The Influence of Secondary Electron Emission and Electron Reflection on a Capacitively Coupled Oxygen Discharge

• Published in: Atoms
• Main Authors: Proto, Andrea, Gudmundsson, Jon Tomas
• Other Authors: Raunvísindastofnun (HÍ), Science Institute (UI), Verkfræði- og náttúruvísindasvið (HÍ), School of Engineering and Natural Sciences (UI), Háskóli Íslands, University of Iceland
• Format: Article in Journal/Newspaper
• Language: English
• Published: MDPI AG 2018
• Subjects: Capacitively-coupled discharge; Oxygen; Particle-in-cell/Monte Carlo collision; Electron heating; Secondary electron emission; Súrefni; Rafeindir; Iceland
• Online Access: https://hdl.handle.net/20.500.11815/1212; https://doi.org/10.3390/atoms6040065

Publisher's version (útgefin grein) The one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 is applied to explore the role of secondary electron emission and electron reflection on the properties of the capacitively-coupled oxygen discharge. At low pressure (10 mTorr), drift-ambipolar heating of the electrons dominates within the plasma bulk, while at higher pressure (50 mTorr), stochastic electron heating in the sheath region dominates. Electron reflection has negligible influence on the electron energy probability function and only a slight influence on the electron heating profile and electron density. Including ion-induced secondary electron emission in the discharge model introduces a high energy tail to the electron energy probability function, enhances the electron density, lowers the electronegativity, and increases the effective electron temperature in the plasma bulk This work was partially supported by the Icelandic Research Fund Grant No. 163086, the University of Iceland Research Fund, and the Swedish Government Agency for Innovation Systems (VINNOVA) Contract No. 2014-04876 Peer Reviewed