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Proto, Andrea
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The Influence of Secondary Electron Emission and Electron Reflection on a Capacitively Coupled Oxygen Discharge
by
Proto
,
Andrea
,
Gudmundsson, Jon Tomas
Published in
Atoms
(2018)
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Related Subjects
Capacitively-coupled discharge
Electron heating
Oxygen
Particle-in-cell/Monte Carlo collision
Rafeindir
Secondary electron emission
Súrefni
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