Optique intégrée polymère à base de photoresist, deux voies possibles : photolithographie directe et photoinscription
International audience *
Main Authors: | , , , , |
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Other Authors: | , |
Format: | Conference Object |
Language: | French |
Published: |
HAL CCSD
2002
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Subjects: | |
Online Access: | https://hal.science/hal-02345640 |
Summary: | International audience * |
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