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Hermanns, Christian Felix
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Dissociative ionization and electron beam induced deposition of tetrakis(dimethylamino)silane, a precursor for silicon nitride deposition
by
Shih, Po-Yuan
,
Tafrishi, Reza
,
Cipriani, Maicol
,
Hermanns
,
Christian
Felix
,
Oster, Jens
,
Gölzhäuser, Armin
,
Edinger, Klaus
,
Ingólfsson, Oddur
Published in
Physical Chemistry Chemical Physics
(2022)
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Physical and Theoretical Chemistry
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