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Dissociative ionization and electron beam induced deposition of tetrakis(dimethylamino)silane, a precursor for silicon nitride deposition

by Shih, Po-Yuan, Tafrishi, Reza, Cipriani, Maicol, Hermanns, Christian Felix, Oster, Jens, Gölzhäuser, Armin, Edinger, Klaus, Ingólfsson, Oddur
Published in Physical Chemistry Chemical Physics (2022)