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1by Naoto SHIBATA, Shuichiro MIWA, Kazuhiro SAWA, Tetsuro MURAYAMA, Masahiro TAKAHASHI, Norio TENMASubjects: “...Mechanical engineering and machinery...”
Published in Transactions of the JSME (in Japanese) (2022)
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Article in Journal/Newspaper -
2“... the mechanical propertiesof the solid products. In semiconductor industry, integrated circuit devices require...”
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