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1by Posada, C. M., Ade, P. A. R., Ahmed, Z., Arnold, K., Austermann, J. E., Bender, A. N., Bleem, L. E., Benson, B. A., Byrum, K., Carlstrom, J. E., Chang, C. L., Cho, H. M., Ciocys, S. T., Cliche, J. F., Crawford, T. M., Cukierman, A., Czaplewski, D., Ding, J., Divan, R., de Haan, T., Dobbs, M. A., Dutcher, D., Everett, W., Gilbert, A., Halverson, N. W., Harrington, N. L., Hattori, K., Henning, J. W., Hilton, G. C., Holzapfel, W. L., Hubmayr, J., Irwin, K. D., Jeong, O., Keisler, R., Kubik, D., Kuo, C. L., Lee, A. T., Leitch, E. M., Lendinez, S., Meyer, S. S., Miller, C. S., Montgomery, J., Myers, M., Nadolski, A., Natoli, T., Nguyen, H., Novosad, V., Padin, S., Pan, Z., Pearson, J., Ruhl, J. E., Saliwanchik, B. R., Smecher, G., Sayre, J. T., Shirokoff, E., Stan, L., Stark, A. A., Sobrin, J., Story, K., Suzuki, A., Thompson, K. L., Tucker, C., Vanderlinde, K., Vieira, J. D., Wang, G., Whitehorn, N., Yefremenko, V., Yoon, K. W., Ziegler, K. E.“... reactive and magnetron sputtering, reactive ion etching, inductively coupled plasma etching and chemical...”
Published in Superconductor Science and Technology (2022)
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2by Ding, J., Ade, P. A. R., Ahmed, Z., Anderson, A. J., Austermann, J. E., Avva, J. S., Thakur, R. Basu, Bender, A. N., Benson, B. A., Carlstrom, J. E., Carter, F. W., Cecil, T., Chang, C. L., Cliche, J. F., Cukierman, A., Denison, E. V., de Haan, T., Divan, R., Dobbs, M. A., Dutcher, D., Everett, W., Foster, A., Gannon, R. N., Gilbert, A., Groh, J. C., Halverson, N. W., Harke-Hosemann, A. H., Harrington, N. L., Henning, J. W., Hilton, G. C., Holzapfel, W. L., Huang, N., Irwin, K. D., Jeong, O. B., Jonas, M., Khaire, T., Kofman, A. M., Korman, M., Kubik, D., Kuhlmann, S., Kuo, C. L., Lee, A. T., Lowitz, A. E., Meyer, S. S., Michalik, D., Miller, C. S., Montgomery, J., Nadolski, A., Natoli, T., Nguyen, H.“... Pole Telescope (SPT-3G). A promising technique for controlling the end point of the release etch...”
Published in Journal of Low Temperature Physics (2018)
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3by Ding, J., Ade, P. A. R., Ahmed, Z., Anderson, A. J., Austermann, J. E., Avva, J. S., Thakur, R. Basu, Bender, A. N., Benson, B. A., Carlstrom, J. E., Carter, F. W., Cecil, T., Chang, C. L., Cliche, J. F., Cukierman, A., Denison, E. V., de Haan, T., Divan, R., Dobbs, M. A., Dutcher, D., Everett, W., Foster, A., Gannon, R. N., Gilbert, A., Groh, J. C., Halverson, N. W., Harke-Hosemann, A. H., Harrington, N. L., Henning, J. W., Hilton, G. C., Holzapfel, W. L., Huang, N., Irwin, K. D., Jeong, O. B., Jonas, M., Khaire, T., Kofman, A. M., Korman, M., Kubik, D., Kuhlmann, S., Kuo, C. L., Lee, A. T., Lowitz, A. E., Meyer, S. S., Michalik, D., Miller, C. S., Montgomery, J., Nadolski, A., Natoli, T., Nguyen, H., Noble, G. I., Novosad, V., Padin, S., Pan, Z., Pearson, J., Posada, C. M., Rahlin, A., Ruhl, J. E., Saunders, L. J., Sayre, J. T., Shirley, I., Shirokoff, E., Smecher, G., Sobrin, J. A., Stan, L., Stark, A. A., Story, K. T., Suzuki, A., Tang, Q. Y., Thompson, K. L., Tucker, C., Vale, L. R., Vanderlinde, K., Vieira, J. D., Wang, G., Whitehorn, N., Yefremenko, V., Yoon, K. W., Young, M. R.“... Pole Telescope (SPT-3G). A promising technique for controlling the end point of the release etch...”
Published in Journal of Low Temperature Physics (2022)
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4by Ding, J., Ade, P. A. R., Ahmed, Z., Anderson, A. J., Austermann, J. E., Avva, J. S., Thakur, R. Basu, Bender, A. N., Benson, B. A., Carlstrom, J. E., Carter, F. W., Cecil, T., Chang, C. L., Cliche, J. F., Cukierman, A., Denison, E. V., de Haan, T., Divan, R., Dobbs, M. A., Dutcher, D., Everett, W., Foster, A., Gannon, R. N., Gilbert, A., Groh, J. C., Halverson, N. W., Harke-Hosemann, A. H., Harrington, N. L., Henning, J. W., Hilton, G. C., Holzapfel, W. L., Huang, N., Irwin, K. D., Jeong, O. B., Jonas, M., Khaire, T., Kofman, A. M., Korman, M., Kubik, D., Kuhlmann, S., Kuo, C. L., Lee, A. T., Lowitz, A. E., Meyer, S. S., Michalik, D., Miller, C. S., Montgomery, J., Nadolski, A., Natoli, T., Nguyen, H., Noble, G. I., Novosad, V., Padin, S., Pan, Z., Pearson, J., Posada, C. M., Rahlin, A., Ruhl, J. E., Saunders, L. J., Sayre, J. T., Shirley, I., Shirokoff, E., Smecher, G., Sobrin, J. A., Stan, L., Stark, A. A., Story, K. T., Suzuki, A., Tang, Q. Y., Thompson, K. L., Tucker, C., Vale, L. R., Vanderlinde, K., Vieira, J. D., Wang, G., Whitehorn, N., Yefremenko, V., Yoon, K. W., Young, M. R.“... Pole Telescope (SPT-3G). A promising technique for controlling the end point of the release etch...”
Published in Journal of Low Temperature Physics (2022)
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5by Ding, J., Ade, P. A. R., Ahmed, Z., Anderson, A. J., Austermann, J. E., Avva, J. S., Thakur, R. Basu, Bender, A. N., Benson, B. A., Carlstrom, J. E., Carter, F. W., Cecil, T., Chang, C. L., Cliche, J. F., Cukierman, A., Denison, E. V., de Haan, T., Divan, R., Dobbs, M. A., Dutcher, D., Everett, W., Foster, A., Gannon, R. N., Gilbert, A., Groh, J. C., Halverson, N. W., Harke-Hosemann, A. H., Harrington, N. L., Henning, J. W., Hilton, G. C., Holzapfel, W. L., Huang, N., Irwin, K. D., Jeong, O. B., Jonas, M., Khaire, T., Kofman, A. M., Korman, M., Kubik, D., Kuhlmann, S., Kuo, C. L., Lee, A. T., Lowitz, A. E., Meyer, S. S., Michalik, D., Miller, C. S., Montgomery, J., Nadolski, A., Natoli, T., Nguyen, H., Noble, G. I., Novosad, V., Padin, S., Pan, Z., Pearson, J., Posada, C. M., Rahlin, A., Ruhl, J. E., Saunders, L. J., Sayre, J. T., Shirley, I., Shirokoff, E., Smecher, G., Sobrin, J. A., Stan, L., Stark, A. A., Story, K. T., Suzuki, A., Tang, Q. Y., Thompson, K. L., Tucker, C., Vale, L. R., Vanderlinde, K., Vieira, J. D., Wang, G., Whitehorn, N., Yefremenko, V., Yoon, K. W., Young, M. R.“... Pole Telescope (SPT-3G). A promising technique for controlling the end point of the release etch...”
Published in Journal of Low Temperature Physics (2022)
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