Electromagnetic Modeling in Near-Field Scanning Microwave Microscopy Highlighting Limitations in Spatial and Electrical Resolutions
International audience Near-field scanning microwave microscopy (NSMM) is a scanning probe microscopy (SPM) technique that measures the local interaction of evanescent microwaves with a sample using a sharp tip probe. The traceability in NSMM is still challenging as the distribution of the electrica...
Published in: | 2018 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO) |
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Main Authors: | , , , , , , , , , , |
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Language: | English |
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HAL CCSD
2018
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Online Access: | https://hal.science/hal-02155769 https://hal.science/hal-02155769/document https://hal.science/hal-02155769/file/neno_aug_2018.pdf https://doi.org/10.1109/NEMO.2018.8503487 |
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Université Polytechnique Hauts-de-France: HAL |
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English |
topic |
near-field scanning microwave microscopy (NSMM) finite element method (FEM) electromagnetic modeling vector network analyzer (VNA) scanning electron microscope (SEM) [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [SPI]Engineering Sciences [physics] |
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near-field scanning microwave microscopy (NSMM) finite element method (FEM) electromagnetic modeling vector network analyzer (VNA) scanning electron microscope (SEM) [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [SPI]Engineering Sciences [physics] Polovodov, Petr Brillard, Charlene Haenssler, Olaf, C Boyaval, Christophe Deresmes, D. Eliet, Sophie Wang, Fei Clement, Nicolas Theron, Didier Dambrine, Gilles Haddadi, Kamel Electromagnetic Modeling in Near-Field Scanning Microwave Microscopy Highlighting Limitations in Spatial and Electrical Resolutions |
topic_facet |
near-field scanning microwave microscopy (NSMM) finite element method (FEM) electromagnetic modeling vector network analyzer (VNA) scanning electron microscope (SEM) [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [SPI]Engineering Sciences [physics] |
description |
International audience Near-field scanning microwave microscopy (NSMM) is a scanning probe microscopy (SPM) technique that measures the local interaction of evanescent microwaves with a sample using a sharp tip probe. The traceability in NSMM is still challenging as the distribution of the electrical fields is affected by several parameters. In this effort, finite element method (FEM) based electromagnetic modeling methods are used to study the effects of the wavelength of operation and the humidity on the spatial and electrical resolutions respectively. From the simulated data, it is demonstrated that the lateral resolution is improved with increasing the frequency of operation. Furthermore, the existence and influence of a water meniscus is highlighted by fine comparison between simulated and measured data. To face these issues, an alternative near-field scanning millimeter-wave microscopy working in a controlled environment is proposed. Keywords-near-field scanning microwave microscopy (NSMM); finite element method (FEM); electromagnetic modeling; vector network analyzer (VNA); scanning electron microscope (SEM). |
author2 |
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN) Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) Nano and Microsystems - IEMN (NAM6 - IEMN) Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) Centrale de Micro Nano Fabrication - IEMN (CMNF - IEMN) Faculty of Civil and Environmental Engineering Technion - Israel Institute of Technology Haifa Nanostructures, nanoComponents & Molecules - IEMN (NCM - IEMN) Advanced NanOmeter DEvices - IEMN (ANODE - IEMN) Circuits Systèmes Applications des Micro-ondes - IEMN (CSAM - IEMN) Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Institut TELECOM/TELECOM Lille1 Institut Mines-Télécom Paris (IMT)-Institut Mines-Télécom Paris (IMT) This work is supported by the French National Research Agency (ANR) under the EquipEx Excelsior (www.excelsior-ncc.eu) and the European Union’s Horizon 2020 research and innovation programme under grant agreement No 761036. European Project: 761036,H2020-NMBP-2017-two-stage,MMAMA(2017) |
format |
Conference Object |
author |
Polovodov, Petr Brillard, Charlene Haenssler, Olaf, C Boyaval, Christophe Deresmes, D. Eliet, Sophie Wang, Fei Clement, Nicolas Theron, Didier Dambrine, Gilles Haddadi, Kamel |
author_facet |
Polovodov, Petr Brillard, Charlene Haenssler, Olaf, C Boyaval, Christophe Deresmes, D. Eliet, Sophie Wang, Fei Clement, Nicolas Theron, Didier Dambrine, Gilles Haddadi, Kamel |
author_sort |
Polovodov, Petr |
title |
Electromagnetic Modeling in Near-Field Scanning Microwave Microscopy Highlighting Limitations in Spatial and Electrical Resolutions |
title_short |
Electromagnetic Modeling in Near-Field Scanning Microwave Microscopy Highlighting Limitations in Spatial and Electrical Resolutions |
title_full |
Electromagnetic Modeling in Near-Field Scanning Microwave Microscopy Highlighting Limitations in Spatial and Electrical Resolutions |
title_fullStr |
Electromagnetic Modeling in Near-Field Scanning Microwave Microscopy Highlighting Limitations in Spatial and Electrical Resolutions |
title_full_unstemmed |
Electromagnetic Modeling in Near-Field Scanning Microwave Microscopy Highlighting Limitations in Spatial and Electrical Resolutions |
title_sort |
electromagnetic modeling in near-field scanning microwave microscopy highlighting limitations in spatial and electrical resolutions |
publisher |
HAL CCSD |
publishDate |
2018 |
url |
https://hal.science/hal-02155769 https://hal.science/hal-02155769/document https://hal.science/hal-02155769/file/neno_aug_2018.pdf https://doi.org/10.1109/NEMO.2018.8503487 |
op_coverage |
Reykjavik, Iceland |
genre |
Iceland |
genre_facet |
Iceland |
op_source |
2018 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO) https://hal.science/hal-02155769 2018 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO), Aug 2018, Reykjavik, Iceland. pp.1-4, ⟨10.1109/NEMO.2018.8503487⟩ |
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op_rights |
info:eu-repo/semantics/OpenAccess |
op_doi |
https://doi.org/10.1109/NEMO.2018.8503487 |
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2018 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO) |
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ftunivphautsdefr:oai:HAL:hal-02155769v1 2024-02-27T08:41:59+00:00 Electromagnetic Modeling in Near-Field Scanning Microwave Microscopy Highlighting Limitations in Spatial and Electrical Resolutions Polovodov, Petr Brillard, Charlene Haenssler, Olaf, C Boyaval, Christophe Deresmes, D. Eliet, Sophie Wang, Fei Clement, Nicolas Theron, Didier Dambrine, Gilles Haddadi, Kamel Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN) Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) Nano and Microsystems - IEMN (NAM6 - IEMN) Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF) Centrale de Micro Nano Fabrication - IEMN (CMNF - IEMN) Faculty of Civil and Environmental Engineering Technion - Israel Institute of Technology Haifa Nanostructures, nanoComponents & Molecules - IEMN (NCM - IEMN) Advanced NanOmeter DEvices - IEMN (ANODE - IEMN) Circuits Systèmes Applications des Micro-ondes - IEMN (CSAM - IEMN) Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Institut TELECOM/TELECOM Lille1 Institut Mines-Télécom Paris (IMT)-Institut Mines-Télécom Paris (IMT) This work is supported by the French National Research Agency (ANR) under the EquipEx Excelsior (www.excelsior-ncc.eu) and the European Union’s Horizon 2020 research and innovation programme under grant agreement No 761036. European Project: 761036,H2020-NMBP-2017-two-stage,MMAMA(2017) Reykjavik, Iceland 2018-08-08 https://hal.science/hal-02155769 https://hal.science/hal-02155769/document https://hal.science/hal-02155769/file/neno_aug_2018.pdf https://doi.org/10.1109/NEMO.2018.8503487 en eng HAL CCSD IEEE info:eu-repo/semantics/altIdentifier/doi/10.1109/NEMO.2018.8503487 info:eu-repo/grantAgreement//761036/EU/Microwave Microscopy for Advanced and Efficient Materials Analysis and Production/MMAMA hal-02155769 https://hal.science/hal-02155769 https://hal.science/hal-02155769/document https://hal.science/hal-02155769/file/neno_aug_2018.pdf doi:10.1109/NEMO.2018.8503487 info:eu-repo/semantics/OpenAccess 2018 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO) https://hal.science/hal-02155769 2018 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO), Aug 2018, Reykjavik, Iceland. pp.1-4, ⟨10.1109/NEMO.2018.8503487⟩ near-field scanning microwave microscopy (NSMM) finite element method (FEM) electromagnetic modeling vector network analyzer (VNA) scanning electron microscope (SEM) [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics [SPI]Engineering Sciences [physics] info:eu-repo/semantics/conferenceObject Conference papers 2018 ftunivphautsdefr https://doi.org/10.1109/NEMO.2018.8503487 2024-01-31T17:33:56Z International audience Near-field scanning microwave microscopy (NSMM) is a scanning probe microscopy (SPM) technique that measures the local interaction of evanescent microwaves with a sample using a sharp tip probe. The traceability in NSMM is still challenging as the distribution of the electrical fields is affected by several parameters. In this effort, finite element method (FEM) based electromagnetic modeling methods are used to study the effects of the wavelength of operation and the humidity on the spatial and electrical resolutions respectively. From the simulated data, it is demonstrated that the lateral resolution is improved with increasing the frequency of operation. Furthermore, the existence and influence of a water meniscus is highlighted by fine comparison between simulated and measured data. To face these issues, an alternative near-field scanning millimeter-wave microscopy working in a controlled environment is proposed. Keywords-near-field scanning microwave microscopy (NSMM); finite element method (FEM); electromagnetic modeling; vector network analyzer (VNA); scanning electron microscope (SEM). Conference Object Iceland Université Polytechnique Hauts-de-France: HAL 2018 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO) 1 4 |