Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera
This work presents the procedures used at Argonne National Laboratory to fabricate large arrays of multichroic transition-edge sensor (TES) bolometers for cosmic microwave background (CMB) measurements. These detectors will be assembled into the focal plane for the SPT-3G camera, the third generatio...
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ftcaltechauth:oai:authors.library.caltech.edu:60782 2023-05-15T18:22:41+02:00 Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera Posada, C. M. Padin, S. 2015-09 https://authors.library.caltech.edu/60782/ https://resolver.caltech.edu/CaltechAUTHORS:20151005-153623900 unknown IOP Publishing Posada, C. M. and Padin, S. (2015) Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera. Superconductor Science and Technology, 28 (9). Art. No. 094002. ISSN 0953-2048. doi:10.1088/0953-2048/28/9/094002. https://resolver.caltech.edu/CaltechAUTHORS:20151005-153623900 <https://resolver.caltech.edu/CaltechAUTHORS:20151005-153623900> Article PeerReviewed 2015 ftcaltechauth https://doi.org/10.1088/0953-2048/28/9/094002 2021-11-11T19:06:06Z This work presents the procedures used at Argonne National Laboratory to fabricate large arrays of multichroic transition-edge sensor (TES) bolometers for cosmic microwave background (CMB) measurements. These detectors will be assembled into the focal plane for the SPT-3G camera, the third generation CMB camera to be installed in the South Pole Telescope. The complete SPT-3G camera will have approximately 2690 pixels, for a total of 16 140 TES bolometric detectors. Each pixel is comprised of a broad-band sinuous antenna coupled to a Nb microstrip line. In-line filters are used to define the different bands before the millimeter-wavelength signal is fed to the respective Ti/Au TES bolometers. There are six TES bolometer detectors per pixel, which allow for measurements of three band-passes (95, 150 and 220 GHz) and two polarizations. The steps involved in the monolithic fabrication of these detector arrays are presented here in detail. Patterns are defined using a combination of stepper and contact lithography. The misalignment between layers is kept below 200 nm. The overall fabrication involves a total of 16 processes, including reactive and magnetron sputtering, reactive ion etching, inductively coupled plasma etching and chemical etching. Article in Journal/Newspaper South pole Caltech Authors (California Institute of Technology) South Pole Superconductor Science and Technology 28 9 094002 |
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Caltech Authors (California Institute of Technology) |
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This work presents the procedures used at Argonne National Laboratory to fabricate large arrays of multichroic transition-edge sensor (TES) bolometers for cosmic microwave background (CMB) measurements. These detectors will be assembled into the focal plane for the SPT-3G camera, the third generation CMB camera to be installed in the South Pole Telescope. The complete SPT-3G camera will have approximately 2690 pixels, for a total of 16 140 TES bolometric detectors. Each pixel is comprised of a broad-band sinuous antenna coupled to a Nb microstrip line. In-line filters are used to define the different bands before the millimeter-wavelength signal is fed to the respective Ti/Au TES bolometers. There are six TES bolometer detectors per pixel, which allow for measurements of three band-passes (95, 150 and 220 GHz) and two polarizations. The steps involved in the monolithic fabrication of these detector arrays are presented here in detail. Patterns are defined using a combination of stepper and contact lithography. The misalignment between layers is kept below 200 nm. The overall fabrication involves a total of 16 processes, including reactive and magnetron sputtering, reactive ion etching, inductively coupled plasma etching and chemical etching. |
format |
Article in Journal/Newspaper |
author |
Posada, C. M. Padin, S. |
spellingShingle |
Posada, C. M. Padin, S. Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera |
author_facet |
Posada, C. M. Padin, S. |
author_sort |
Posada, C. M. |
title |
Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera |
title_short |
Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera |
title_full |
Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera |
title_fullStr |
Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera |
title_full_unstemmed |
Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera |
title_sort |
fabrication of large dual-polarized multichroic tes bolometer arrays for cmb measurements with the spt-3g camera |
publisher |
IOP Publishing |
publishDate |
2015 |
url |
https://authors.library.caltech.edu/60782/ https://resolver.caltech.edu/CaltechAUTHORS:20151005-153623900 |
geographic |
South Pole |
geographic_facet |
South Pole |
genre |
South pole |
genre_facet |
South pole |
op_relation |
Posada, C. M. and Padin, S. (2015) Fabrication of large dual-polarized multichroic TES bolometer arrays for CMB measurements with the SPT-3G camera. Superconductor Science and Technology, 28 (9). Art. No. 094002. ISSN 0953-2048. doi:10.1088/0953-2048/28/9/094002. https://resolver.caltech.edu/CaltechAUTHORS:20151005-153623900 <https://resolver.caltech.edu/CaltechAUTHORS:20151005-153623900> |
op_doi |
https://doi.org/10.1088/0953-2048/28/9/094002 |
container_title |
Superconductor Science and Technology |
container_volume |
28 |
container_issue |
9 |
container_start_page |
094002 |
_version_ |
1766202099364790272 |