Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope
We present information about the design and fabrication of 90 GHz Transition Edge Sensor (TES) detectors deployed in the SPTpol camera for investigation of the cosmic microwave background (CMB) polarization signal. The 90 GHz portion of the camera consists of 180 individual feedhorn modules with dua...
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ftcaltechauth:oai:authors.library.caltech.edu:39028 2023-05-15T18:22:47+02:00 Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope Yefremenko, V. Lucker, M. Padin, S. Shirokoff, E. Vieira, J. 2013-06 https://authors.library.caltech.edu/39028/ https://resolver.caltech.edu/CaltechAUTHORS:20130621-124941702 unknown IEEE Yefremenko, V. and Lucker, M. and Padin, S. and Shirokoff, E. and Vieira, J. (2013) Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope. IEEE Transactions on Applied Superconductivity, 23 (3). Art. No. 2100605. ISSN 1051-8223. doi:10.1109/TASC.2012.2235892. https://resolver.caltech.edu/CaltechAUTHORS:20130621-124941702 <https://resolver.caltech.edu/CaltechAUTHORS:20130621-124941702> Article PeerReviewed 2013 ftcaltechauth https://doi.org/10.1109/TASC.2012.2235892 2021-11-11T18:54:11Z We present information about the design and fabrication of 90 GHz Transition Edge Sensor (TES) detectors deployed in the SPTpol camera for investigation of the cosmic microwave background (CMB) polarization signal. The 90 GHz portion of the camera consists of 180 individual feedhorn modules with dual polarization-sensitive detectors. We discuss microfabrication details and the characterization of detector elements. Each detector incorporates a dipole-like Pd-Au absorber and Mo/Au TES thermometer, suspended together on a rectangular silicon nitride (SiN) membrane via 6 long (640 μm) and narrow (10 μm) legs. The geometry of the SiN legs was optimized to provide the target thermal conductance of 200 pW/K in combination with mechanical robustness and reliability. The proximity effect in superconductor (Mo) and normal metal (Au) bilayers was utilized to obtain a TES operating temperature between 520 and 540 mK. Excellent superconducting properties (transition width <; 1 mK) and Tc uniformity (<; 3 mK) across 2 '' wafers were achieved by sputtering in a confocal system under a single vacuum using an independent RF bias applied to the substrate. Superconducting Nb dots patterned on the TES surface provided controllable broadening of the transition width. We report the results of transition measurements, along with characterization of film morphology. Article in Journal/Newspaper South pole Caltech Authors (California Institute of Technology) South Pole IEEE Transactions on Applied Superconductivity 23 3 2100605 2100605 |
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Caltech Authors (California Institute of Technology) |
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description |
We present information about the design and fabrication of 90 GHz Transition Edge Sensor (TES) detectors deployed in the SPTpol camera for investigation of the cosmic microwave background (CMB) polarization signal. The 90 GHz portion of the camera consists of 180 individual feedhorn modules with dual polarization-sensitive detectors. We discuss microfabrication details and the characterization of detector elements. Each detector incorporates a dipole-like Pd-Au absorber and Mo/Au TES thermometer, suspended together on a rectangular silicon nitride (SiN) membrane via 6 long (640 μm) and narrow (10 μm) legs. The geometry of the SiN legs was optimized to provide the target thermal conductance of 200 pW/K in combination with mechanical robustness and reliability. The proximity effect in superconductor (Mo) and normal metal (Au) bilayers was utilized to obtain a TES operating temperature between 520 and 540 mK. Excellent superconducting properties (transition width <; 1 mK) and Tc uniformity (<; 3 mK) across 2 '' wafers were achieved by sputtering in a confocal system under a single vacuum using an independent RF bias applied to the substrate. Superconducting Nb dots patterned on the TES surface provided controllable broadening of the transition width. We report the results of transition measurements, along with characterization of film morphology. |
format |
Article in Journal/Newspaper |
author |
Yefremenko, V. Lucker, M. Padin, S. Shirokoff, E. Vieira, J. |
spellingShingle |
Yefremenko, V. Lucker, M. Padin, S. Shirokoff, E. Vieira, J. Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope |
author_facet |
Yefremenko, V. Lucker, M. Padin, S. Shirokoff, E. Vieira, J. |
author_sort |
Yefremenko, V. |
title |
Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope |
title_short |
Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope |
title_full |
Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope |
title_fullStr |
Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope |
title_full_unstemmed |
Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope |
title_sort |
design and fabrication of 90 ghz tes polarimeter detectors for the south pole telescope |
publisher |
IEEE |
publishDate |
2013 |
url |
https://authors.library.caltech.edu/39028/ https://resolver.caltech.edu/CaltechAUTHORS:20130621-124941702 |
geographic |
South Pole |
geographic_facet |
South Pole |
genre |
South pole |
genre_facet |
South pole |
op_relation |
Yefremenko, V. and Lucker, M. and Padin, S. and Shirokoff, E. and Vieira, J. (2013) Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope. IEEE Transactions on Applied Superconductivity, 23 (3). Art. No. 2100605. ISSN 1051-8223. doi:10.1109/TASC.2012.2235892. https://resolver.caltech.edu/CaltechAUTHORS:20130621-124941702 <https://resolver.caltech.edu/CaltechAUTHORS:20130621-124941702> |
op_doi |
https://doi.org/10.1109/TASC.2012.2235892 |
container_title |
IEEE Transactions on Applied Superconductivity |
container_volume |
23 |
container_issue |
3 |
container_start_page |
2100605 |
op_container_end_page |
2100605 |
_version_ |
1766202208175521792 |