Elemental diffusion during the droplet epitaxy growth of In(Ga)As/GaAs(001) quantum dots by metal-organic chemical vapor deposition
Droplet epitaxy is an important method to produce epitaxial semiconductor quantum dots (QDs). Droplet epitaxy of III-V QDs comprises group III elemental droplet deposition and the droplet crystallization through the introduction of group V elements. Here, we report that, in the droplet epitaxy of In...
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ftanucanberra:oai:openresearch-repository.anu.edu.au:1885/16016 2024-01-14T10:08:34+01:00 Elemental diffusion during the droplet epitaxy growth of In(Ga)As/GaAs(001) quantum dots by metal-organic chemical vapor deposition Chen, Z. B. Lei, W. Chen, B. Wang, Y. B. Liao, X. Z. Zou, J. Ringer, S. P. Jagadish, C. Tan, Hark Hoe http://hdl.handle.net/1885/16016 https://doi.org/10.1063/1.4859915 https://openresearch-repository.anu.edu.au/bitstream/1885/16016/4/U3488905xPUB1872_2014.pdf.jpg https://openresearch-repository.anu.edu.au/bitstream/1885/16016/7/01_Chen_Elemental_diffusion_during_the_2014.pdf.jpg unknown American Institute of Physics (AIP) 0003-6951 http://hdl.handle.net/1885/16016 doi:10.1063/1.4859915 https://openresearch-repository.anu.edu.au/bitstream/1885/16016/4/U3488905xPUB1872_2014.pdf.jpg https://openresearch-repository.anu.edu.au/bitstream/1885/16016/7/01_Chen_Elemental_diffusion_during_the_2014.pdf.jpg http://www.sherpa.ac.uk/romeo/issn/0003-6951."Publishers version/PDF may be used on author's personal website, institutional website or institutional repository" from SHERPA/RoMEO site (as at 22/10/15). Copyright 2014 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters and may be found at https://doi.org/10.1063/1.4859915 Applied Physics Letters Journal article ftanucanberra https://doi.org/10.1063/1.4859915 2023-12-15T09:35:30Z Droplet epitaxy is an important method to produce epitaxial semiconductor quantum dots (QDs). Droplet epitaxy of III-V QDs comprises group III elemental droplet deposition and the droplet crystallization through the introduction of group V elements. Here, we report that, in the droplet epitaxy of InAs/GaAs(001) QDs using metal-organic chemical vapor deposition, significant elemental diffusion from the substrate to In droplets occurs, resulting in the formation of In(Ga)As crystals, before As flux is provided. The supply of As flux suppresses the further elemental diffusion from the substrate and promotes surface migration, leading to large island formation with a low island density. The authors are grateful for the scientific and technical support from the Australian Microscopy and Microanalysis Research Facility node at the University of Sydney. We thank the Australian National Fabrication Facility for providing access to growth facilities used in this work. This research was financially supported by the Australian Research Council. Article in Journal/Newspaper Low Island Australian National University: ANU Digital Collections Applied Physics Letters 104 2 022108 |
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Droplet epitaxy is an important method to produce epitaxial semiconductor quantum dots (QDs). Droplet epitaxy of III-V QDs comprises group III elemental droplet deposition and the droplet crystallization through the introduction of group V elements. Here, we report that, in the droplet epitaxy of InAs/GaAs(001) QDs using metal-organic chemical vapor deposition, significant elemental diffusion from the substrate to In droplets occurs, resulting in the formation of In(Ga)As crystals, before As flux is provided. The supply of As flux suppresses the further elemental diffusion from the substrate and promotes surface migration, leading to large island formation with a low island density. The authors are grateful for the scientific and technical support from the Australian Microscopy and Microanalysis Research Facility node at the University of Sydney. We thank the Australian National Fabrication Facility for providing access to growth facilities used in this work. This research was financially supported by the Australian Research Council. |
format |
Article in Journal/Newspaper |
author |
Chen, Z. B. Lei, W. Chen, B. Wang, Y. B. Liao, X. Z. Zou, J. Ringer, S. P. Jagadish, C. Tan, Hark Hoe |
spellingShingle |
Chen, Z. B. Lei, W. Chen, B. Wang, Y. B. Liao, X. Z. Zou, J. Ringer, S. P. Jagadish, C. Tan, Hark Hoe Elemental diffusion during the droplet epitaxy growth of In(Ga)As/GaAs(001) quantum dots by metal-organic chemical vapor deposition |
author_facet |
Chen, Z. B. Lei, W. Chen, B. Wang, Y. B. Liao, X. Z. Zou, J. Ringer, S. P. Jagadish, C. Tan, Hark Hoe |
author_sort |
Chen, Z. B. |
title |
Elemental diffusion during the droplet epitaxy growth of In(Ga)As/GaAs(001) quantum dots by metal-organic chemical vapor deposition |
title_short |
Elemental diffusion during the droplet epitaxy growth of In(Ga)As/GaAs(001) quantum dots by metal-organic chemical vapor deposition |
title_full |
Elemental diffusion during the droplet epitaxy growth of In(Ga)As/GaAs(001) quantum dots by metal-organic chemical vapor deposition |
title_fullStr |
Elemental diffusion during the droplet epitaxy growth of In(Ga)As/GaAs(001) quantum dots by metal-organic chemical vapor deposition |
title_full_unstemmed |
Elemental diffusion during the droplet epitaxy growth of In(Ga)As/GaAs(001) quantum dots by metal-organic chemical vapor deposition |
title_sort |
elemental diffusion during the droplet epitaxy growth of in(ga)as/gaas(001) quantum dots by metal-organic chemical vapor deposition |
publisher |
American Institute of Physics (AIP) |
url |
http://hdl.handle.net/1885/16016 https://doi.org/10.1063/1.4859915 https://openresearch-repository.anu.edu.au/bitstream/1885/16016/4/U3488905xPUB1872_2014.pdf.jpg https://openresearch-repository.anu.edu.au/bitstream/1885/16016/7/01_Chen_Elemental_diffusion_during_the_2014.pdf.jpg |
genre |
Low Island |
genre_facet |
Low Island |
op_source |
Applied Physics Letters |
op_relation |
0003-6951 http://hdl.handle.net/1885/16016 doi:10.1063/1.4859915 https://openresearch-repository.anu.edu.au/bitstream/1885/16016/4/U3488905xPUB1872_2014.pdf.jpg https://openresearch-repository.anu.edu.au/bitstream/1885/16016/7/01_Chen_Elemental_diffusion_during_the_2014.pdf.jpg |
op_rights |
http://www.sherpa.ac.uk/romeo/issn/0003-6951."Publishers version/PDF may be used on author's personal website, institutional website or institutional repository" from SHERPA/RoMEO site (as at 22/10/15). Copyright 2014 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters and may be found at https://doi.org/10.1063/1.4859915 |
op_doi |
https://doi.org/10.1063/1.4859915 |
container_title |
Applied Physics Letters |
container_volume |
104 |
container_issue |
2 |
container_start_page |
022108 |
_version_ |
1788062972188295168 |