Fabricating patterned polyelectrolyte brushes by dynamic microprojection lithography for selective electroless metal deposition
Abstract The emerging need for flexible and wearable electronics has been pushing the edge of the traditional electroless deposition (ELD) technique. With the rapid development of polymer‐assisted ELD (PAELD), its time‐consuming and possess‐complicated procedures have hindered the application of the...
Published in: | Journal of Applied Polymer Science |
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crwiley:10.1002/app.50249 2024-06-02T08:05:48+00:00 Fabricating patterned polyelectrolyte brushes by dynamic microprojection lithography for selective electroless metal deposition Hu, Fenghuai Zhao, Haili Pan, Yunfei Yang, Dasheng Sha, Jin Gao, Yang National Key Research and Development Program of China National Natural Science Foundation of China Shanghai Rising-Star Program 2020 http://dx.doi.org/10.1002/app.50249 https://onlinelibrary.wiley.com/doi/pdf/10.1002/app.50249 https://onlinelibrary.wiley.com/doi/full-xml/10.1002/app.50249 en eng Wiley http://onlinelibrary.wiley.com/termsAndConditions#vor Journal of Applied Polymer Science volume 138, issue 16 ISSN 0021-8995 1097-4628 journal-article 2020 crwiley https://doi.org/10.1002/app.50249 2024-05-03T11:27:08Z Abstract The emerging need for flexible and wearable electronics has been pushing the edge of the traditional electroless deposition (ELD) technique. With the rapid development of polymer‐assisted ELD (PAELD), its time‐consuming and possess‐complicated procedures have hindered the application of the technique. Here, for purpose of addressing the challenge, the work demonstrates a highly efficient and versatile method, based on the procedure consisting of the customized polyelectrolyte brushes patterns fabrication with the assistance of mask‐free dynamic microprojection lithography and sequential selective ELD (DML‐ELD), for the fabrication of arbitrary electrode on the silicon dioxide/silicon (SiO 2 /Si) substrate. The resistivity of the patterned copper electrode maintained around 0.062 Ω∙mm at room temperature, indicating the high reproducibility and stability of the method. Furthermore, an interdigital copper electrode fabricated with the DML‐ELD method was coated with a poly(vinyl alcohol) sensing layer, forming a sandwich structure for the ambient humidity detection. The sensitivity of the lab‐made humidity sensor achieves 0.82 pF/%RH (<80%RH) and 19.3 pF/%RH (>80%RH). The work has demonstrated the broad prospect of the proposed DML‐ELD method in the rapid and customized manufacturing of microcircuit fabrication for electronic devices. Article in Journal/Newspaper DML Wiley Online Library Journal of Applied Polymer Science 138 16 |
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Wiley Online Library |
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English |
description |
Abstract The emerging need for flexible and wearable electronics has been pushing the edge of the traditional electroless deposition (ELD) technique. With the rapid development of polymer‐assisted ELD (PAELD), its time‐consuming and possess‐complicated procedures have hindered the application of the technique. Here, for purpose of addressing the challenge, the work demonstrates a highly efficient and versatile method, based on the procedure consisting of the customized polyelectrolyte brushes patterns fabrication with the assistance of mask‐free dynamic microprojection lithography and sequential selective ELD (DML‐ELD), for the fabrication of arbitrary electrode on the silicon dioxide/silicon (SiO 2 /Si) substrate. The resistivity of the patterned copper electrode maintained around 0.062 Ω∙mm at room temperature, indicating the high reproducibility and stability of the method. Furthermore, an interdigital copper electrode fabricated with the DML‐ELD method was coated with a poly(vinyl alcohol) sensing layer, forming a sandwich structure for the ambient humidity detection. The sensitivity of the lab‐made humidity sensor achieves 0.82 pF/%RH (<80%RH) and 19.3 pF/%RH (>80%RH). The work has demonstrated the broad prospect of the proposed DML‐ELD method in the rapid and customized manufacturing of microcircuit fabrication for electronic devices. |
author2 |
National Key Research and Development Program of China National Natural Science Foundation of China Shanghai Rising-Star Program |
format |
Article in Journal/Newspaper |
author |
Hu, Fenghuai Zhao, Haili Pan, Yunfei Yang, Dasheng Sha, Jin Gao, Yang |
spellingShingle |
Hu, Fenghuai Zhao, Haili Pan, Yunfei Yang, Dasheng Sha, Jin Gao, Yang Fabricating patterned polyelectrolyte brushes by dynamic microprojection lithography for selective electroless metal deposition |
author_facet |
Hu, Fenghuai Zhao, Haili Pan, Yunfei Yang, Dasheng Sha, Jin Gao, Yang |
author_sort |
Hu, Fenghuai |
title |
Fabricating patterned polyelectrolyte brushes by dynamic microprojection lithography for selective electroless metal deposition |
title_short |
Fabricating patterned polyelectrolyte brushes by dynamic microprojection lithography for selective electroless metal deposition |
title_full |
Fabricating patterned polyelectrolyte brushes by dynamic microprojection lithography for selective electroless metal deposition |
title_fullStr |
Fabricating patterned polyelectrolyte brushes by dynamic microprojection lithography for selective electroless metal deposition |
title_full_unstemmed |
Fabricating patterned polyelectrolyte brushes by dynamic microprojection lithography for selective electroless metal deposition |
title_sort |
fabricating patterned polyelectrolyte brushes by dynamic microprojection lithography for selective electroless metal deposition |
publisher |
Wiley |
publishDate |
2020 |
url |
http://dx.doi.org/10.1002/app.50249 https://onlinelibrary.wiley.com/doi/pdf/10.1002/app.50249 https://onlinelibrary.wiley.com/doi/full-xml/10.1002/app.50249 |
genre |
DML |
genre_facet |
DML |
op_source |
Journal of Applied Polymer Science volume 138, issue 16 ISSN 0021-8995 1097-4628 |
op_rights |
http://onlinelibrary.wiley.com/termsAndConditions#vor |
op_doi |
https://doi.org/10.1002/app.50249 |
container_title |
Journal of Applied Polymer Science |
container_volume |
138 |
container_issue |
16 |
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1800750674748637184 |